High resolution EUV microscope

ЦИТ-Нано / CIT-Nano / Researches

X-ray microscope designed for imaging of nanoscale technological and biological objects (bacteria, cells, tissues) with high resolution (50 nm) X-ray wavelengths. The main advantages of the tomographic method of recording images are: 20 times higher resolution (compared to the projection X-ray microscopes), wide range of radiation wavelength used (from 0.01 to 40 nm), easy of use, economics low (about 2 mln.) Another advantages of this method are: simple design, lack of optics, so no limits on the wavelength of the used radiation are presented (instead of the soft X-ray, hard X-ray can be used with wavelength of an angstrom), high resolution (limited only by dynamic range of the photodetector and the amplifier)

Using x-ray lasers and synchrotron sources is not available to routine laboratory due to great cost and size values of the devices. Few laboratories uses x-ray laser technology (Levermorskaya laboratory in the U. S., Kurchatov Center, Dubna, CERN), the devices are made in form of laboratory specimens, commercial products of this type are not available.

Usually in order to create X-ray microscope, microfocus X-ray source is used. Rays, emit from this source like form a point. Studied object is placed near the source in the emitted rays. Registration matrix is placed at some distance from the object. Using this technique obtained resolution is no higher than 1 micron. This principle is used in a few commercial X-ray microscopes in our country (LOMA) and abroad.